| 摘要 |
PURPOSE:To facilitate the improvement of controlling performance by facilitating the designing and adjustment of control parameters. CONSTITUTION:A vibration isolation base 1 is supported by respective horizontal (x)-directional support means 2a, 2b, 2c, and 2d and (y)-directional support means 3a, 3b, 3c, and 3d which are arranged at the four corner positions of a rectangle or square in a horizontal plane where the gravity center position G of the vibration isolation base 1 is set at the intersection of the diagonals and equal in spring constant and viscosity attenuation coefficient in the same directions. Then, the vibration of the vibration isolation base 1 like this is detected by vibration sensors 6a, 6b, and 6c and fed back to respective actuators 4a, 4b, 4c, and 4d, and 5a, 5b, 5c, and 5d through a motion mode extracting arithmetic means 7, noninterference control arithmetic units 8a, 8b, and 8c which perform control arithmetic independently by respective motion modes, and a thrust distributing device 9 to form control loops independently by the respective motion modes of the vibration isolation base 1. |
