| 摘要 |
PURPOSE:To provide a substrate treating system which allows efficient treatment of a substrate with limited foot space. CONSTITUTION:A main robot 101 can advance to the carrying path 24 of an indexer robot 20 and a substrate delivering position 26 is set on the carrying path 24 and on the extension of the row of substrate treating section 30. This arrangement eliminates the need of intricate control, e.g. rotational operation, of a first substrate carrying unit while allowing common use of the substrate delivering position as the carrying path of second substrate carrying unit thus reducing the foot space as a whole. Consequently, the driving mechanism and the control are facilitated and efficient treatment of substrate is realized by shortening the carrying time through linear carriage. |
