| 摘要 |
<p>PURPOSE:To facilitate maintenance and save space, by installing a fixing surface on the lower side of a gas apparatus main body, and installing a gas inlet part and a gas outlet part on the fixing surface. CONSTITUTION:A gas supply inlet 120 and a gas discharge outlet 121 are installed on the lower surface side of a substrate 41. Gas supplied to the gas supply inlet 120 passes penetration holes 46, reaches a switching valve 42-1 on the upper surface, passes again the penetration holes 46, is guided to the lower surface side of the substrate 41, and enters a U-shaped pipe 45-1. The gas passes again through the penetration holes 46, is guided to the upper surface side of the substrate 41, and enters a mass flow rate control equipment 43. The gas reaches the discharge outlet 121 through the following; the penetration holes 46, a pipe 45-2, the penetration holes 46, a switching valve 42-3, the penetration holes 46, a pipe 45-3, a filter 110, a switching valve 42-4, and the penetration hole 46. Thereby fixing workability is improved, maintenability of equipment is enhanced, and miniaturization of equipment is realized.</p> |
