发明名称 Optical achromatic interferometer of the trilateral phase shift type.
摘要 In the interferometer proposed, an input lens defines a reference plane (PC), optically conjugate with the plane in which the wave front of a light beam is analysed. A bidimensional mesh grating (GR) is placed in this reference plane (PC), perpendicularly to the beam. The various partial beams due to the various diffraction orders are focused jointly by a first lens (L1) in an intermediate focal plane (PF), in the vicinity of which a mask (M) selects from these partial beams those which result from at least three different diffraction orders. A second lens (L2) brings the selected partial beams to a plane (PO), called the zero-sensitivity plane, which is conjugate with the plane of the grating. The interference image is observed in a working plane (PA) located at a chosen distance (d) from the zero-sensitivity plane. <IMAGE>
申请公布号 EP0654655(A1) 申请公布日期 1995.05.24
申请号 EP19940402581 申请日期 1994.11.15
申请人 OFFICE NATIONAL D'ETUDES ET DE RECHERCHES AEROSPATIALES(O.N.E.R.A.) 发明人 PRIMOT, JEROME;SOGNO, LUDOVIC
分类号 G01B9/02;G01B11/24;G01J9/02;G01M11/00;G01N21/958 主分类号 G01B9/02
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