| 摘要 |
PROBLEM TO BE SOLVED: To materialize a minute electronic device capable of easily, certainly, and stably forming an intended graphene with a good control property, without using a transfer process, and having high reliability and high performance.SOLUTION: An insulation layer 2 is formed on a substrate 1, and a cavity 2A is formed on the insulation layer 2. The cavity 2A is filled with a catalyst material 4. A graphene 5 is formed on an exposure surface 4a of the catalyst material 4 on the insulation layer 2, and a pair of electrodes 5 and 6 is formed so as to connect to both end portions of the graphene 5 on the insulation layer 2. The graphene 5 is partially removed to form a graphene ribbon 8, and the catalyst material 4 is removed through clearances 2A1 and 2A2 which are parts from which the graphene ribbon 8 is removed. |
