发明名称 REPAIR METHOD FOR ELECTRON EMITTING ELEMENT AND IMAGE FORMING DEVICE
摘要 <p>PURPOSE:To easily repair a defective part when generated a defect in a thin film containing an electron emitting part of an electron emitting element. CONSTITUTION:A thin film including an electron emitting part is provided between opposed electrodes, and this thin film is formed of electron emitting material. In this electron emitting element, when a defect is generated in the thin film including the electron emitting part, a defect part of the thin film is irradiated by heat source light in the atmosphere of chemical evaporation gas, to repair the defective part by evaporating the chemical evaporation gas. Here, the chemical evaporation gas is at least the same to a material by which the electron emitting part is formed, and the heat source light has energy of decomosing the chemical evaporation gas. A part of the thin film, containing at least the electron emitting part of the electron emitting element, has a light absorber.</p>
申请公布号 JPH07192629(A) 申请公布日期 1995.07.28
申请号 JP19930345928 申请日期 1993.12.24
申请人 CANON INC 发明人 UNO KUMIKO;NOMA TAKASHI
分类号 H01J9/50;H01J1/30;H01J1/316;H01J9/02;H01J29/04;H01J31/12;H01J31/15;(IPC1-7):H01J9/50 主分类号 H01J9/50
代理机构 代理人
主权项
地址