| 摘要 |
PURPOSE:To establish a method of manufacturing a semiconductor gas rate sensor which can prevent an adhesive from flowing out to a nozzle hole and produce a good flow of the gas. CONSTITUTION:A semiconductor gas rate sensor is formed by adhering together the first semiconductor base board 1 and the second semiconductor base board 3 which is provided with a thermo-setting adhesive layer 2 on its joint surface and is equipped internally with a substrate 6 having a gas flow path 4 and a nozzle hole 5 for spouting of a gas into the gas flow path. In this substrate 6, sensing parts 7, 8 to sense the gas stream deflecting condition when an angular velocity is applied to the substrate 6 are furnished in such a way as striding the gas flow path 4. The nozzle hole 5 is formed by joining a groove 12 formed at the joint surface of the first board 1 with the joining surface of the second board 3. In manufacture of such a semiconductor gas rate sensor, the first and second boards 1, 3 are joined together and heated in the condition that the second is situated under so that the two members are adhered fast to each other. |
