发明名称 METHOD FOR REPAIRING SUPERCONDUCTING FILM
摘要 PROBLEM TO BE SOLVED: To provide a method for repairing the defect of a superconducting film capable of repairing a superconducting film without losing high temperature superconduction.SOLUTION: Provided is a defect repairing method including the detection of a superconducting film in a production process thereof. When a defect is detected, by performing pulse laser deposition (PLD), a superconducting repair structure is directly deposited on the position of the defect.SELECTED DRAWING: Figure 1
申请公布号 JP2016189349(A) 申请公布日期 2016.11.04
申请号 JP20160141935 申请日期 2016.07.20
申请人 INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE 发明人 HUANG KUN-PING;CHIN SHAKUSEN;TONG CHIANG-HSIUNG;RA SHII;TZENG WEN-YEN
分类号 H01B13/00;C23C14/06;C23C14/28;H01L39/24 主分类号 H01B13/00
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