发明名称 |
METHOD FOR REPAIRING SUPERCONDUCTING FILM |
摘要 |
PROBLEM TO BE SOLVED: To provide a method for repairing the defect of a superconducting film capable of repairing a superconducting film without losing high temperature superconduction.SOLUTION: Provided is a defect repairing method including the detection of a superconducting film in a production process thereof. When a defect is detected, by performing pulse laser deposition (PLD), a superconducting repair structure is directly deposited on the position of the defect.SELECTED DRAWING: Figure 1 |
申请公布号 |
JP2016189349(A) |
申请公布日期 |
2016.11.04 |
申请号 |
JP20160141935 |
申请日期 |
2016.07.20 |
申请人 |
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE |
发明人 |
HUANG KUN-PING;CHIN SHAKUSEN;TONG CHIANG-HSIUNG;RA SHII;TZENG WEN-YEN |
分类号 |
H01B13/00;C23C14/06;C23C14/28;H01L39/24 |
主分类号 |
H01B13/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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