| 摘要 |
PURPOSE:To eliminate secular change of sensitivity and to enhance safety by dissolving an alkali-soluble resin and a compound having a quinonediazido group with a specified solvent or a mixture with another solvent. CONSTITUTION:The alkali-soluble resin and the compound having the quinonediazido group are dissolved in a single solvent of an alkyl L(+) type alpha-oxypropionate or a solvent mixture with another solvent. As the alkali-soluble resin, novolak resins, acrylic resins, styrene-acrylic copolymers, hydroxystyrene polymers, polyvinylphenols, poly-alpha-methylphenols, and the like are enumerated, and alkali-soluble novolak resins are especially preferred. As the photosensitive component, the compounds each having the quinonediazido group, preferably, esters of sulfonic acids with polyhydroxy compounds are used. |
