SCANNING PROBE MICROSCOPE DEVICE

摘要

PURPOSE:To provide a scanning probe microscope device capable of enhancing the coincidence accuracy of the visual fields of a scanning probe microscope and an optical microscope at a low cost in a scanning probe microscope device, especially, an apparatus containing both of the optical microscope observing a sample and the scanning probe microscope. CONSTITUTION:The scanning probe microscope device containing an optical microscope 40 observing a sample 12 and a scanning probe microscope 46 is constituted so as to contain the changeover stage 30 to which the optical microscope 40 and the scanning probe microscope 46 are attached and moving mechanisms 27, 28 moving the changeover stand 30 so as to align the optical microscope 40 or the probe 50 of the scanning probe microscope 46 with the sample 12.