发明名称 PACKAGING METHOD AND PACKAGED PRODUCT OF SEMICONDUCTOR DEVICE
摘要 <p>PURPOSE:To provide a semiconductor device packaging method and package thereof wherein the semiconductor device can be connected to a circuit board at a high productivity and high reliability. CONSTITUTION:Connecting electrodes 6 made of a thermoplastic resin setting type conductive material are formed on a specified area of a circuit board 4, a semiconductor device 1 is vacuum checked by a thermocompression bonding tool 7 to bringing bumps 3 of the device 1 into contact with connecting electrodes 6 of the circuit board 4, thereby thermocompression bonding them. Since the thermoplastic resin-setting type conductive material quickly hardening by cooling is used, the productivity is improved. Since the thermocompression bonding is made at a lower temp., the thermal stress caused by the thermal expansion coefficient difference between the semiconductor device and circuit board is little and the reliability is improved.</p>
申请公布号 JPH07321162(A) 申请公布日期 1995.12.08
申请号 JP19940112548 申请日期 1994.05.26
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 BESSHO YOSHIHIRO
分类号 H01L21/60;H01L21/52;H01L21/603;(IPC1-7):H01L21/603 主分类号 H01L21/60
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