Sensor for contactless measurement of media parameters

摘要

The sensor consists of microstructures (4) attached to a membrane (1) held in a frame (3). The frame is in the form of a housing which encloses a vol. (8). The vol. is filled with a medium (2) whose speed of sound is less than that of the medium (7) under investigation. The housing has a capillary opening (8a). The medium in the vol. is a gas. The sensor performs the measurements using an ultrasonic measurement method.