HALOGENATED CARBOXYLIC ACID CLEANING AGENTS FOR FABRICATING INTEGRATED CIRCUITS AND THE PROCESS FOR USING THE SAME,申请号KR19920018718-传众专利搜索

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发明名称	HALOGENATED CARBOXYLIC ACID CLEANING AGENTS FOR FABRICATING INTEGRATED CIRCUITS AND THE PROCESS FOR USING THE SAME
摘要
申请公布号	KR960002631(B1)	申请公布日期	1996.02.24
申请号	KR19920018718	申请日期	1992.10.10
申请人	AIRPRODUCTS AND CHEMICALS INC.	发明人	ROBERT, DAVID ALLEN;IVANKOVITS, JOHN CHRISTOPHER;BOHLING, DAVID ARTHUR
分类号	C11D7/02;C11D7/08;C11D7/28;C11D11/00;C23G5/00;H01L21/304;H01L21/306;H01L21/3105;H05K3/26;(IPC1-7):C11D7/28;C11D3/20	主分类号	C11D7/02
代理机构		代理人
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