| 摘要 |
<p>PURPOSE: To enhance the reliability by stabilizing the driving of a miniature chopper in a pyroelectric infrared sensor employing a piezoelectric actuator. CONSTITUTION: Piezoelectrics 12a, 12b are bonded to shims 11a, 11b, respectively, and the shims are secured, only in the vicinity of a shim hole machining part 21a thereof, to sensor bases 14a, 14b by means of unimorphic element securing pieces 15a, 15b thus constituting the chopper for a unimorphic piezoelectric element. Consequently, the resonance frequency of unimorphic element is lowered and the chopper is driven in the vicinity of resonance frequency. This structure realizes integrated management of the chopper and the fixing part while facilitating replacement of the chopper and suppressing fluctuation in the resonance frequency among individual choppers thus realizing a miniature chopper producing a large displacement while stabilizing the driving.</p> |
