SEMICONDUCTOR-TYPE ACCELERATION SENSOR

摘要

PURPOSE: To provide a superior semiconductor-type acceleration sensor which has a high directivity and a high sensitivity. CONSTITUTION: Supposing that X-axis and Y-axis are set passing the center point O within plane of a diaphragm 18 formed at the center of a silicon substrate 16 and intersecting at right angles each other, two CMOS inverters 21a, 21b are arranged to be axially symmetric to each other with respect to both the X-axis and the Y-axis. The size of an acceleration is detected based on sum of logical threshold voltages of the CMOS inverters 21a, 21b.