METHOD FOR MAKING A ELECTROCHROMIC THIN FILM

摘要

The manufacturing method reduces the manufacturing cost by eliminating heat treatment process. The manufacturing method comprises: loading the substrate(5) and facing the metal wire(2) with ionized electrode(3); removing gas to maintain the pressure below 10-5 torr; injecting oxygen gas and applying the voltage to the ionized electrode after preheating a metal wire(2); and depositing a metal oxide film on the substrate(5) after evaporating the metal wire(2).