Optoelectric position measuring device

摘要

In accordance with Figure 1, in an integrated optical interferometer a light beam (5) is split up into two component bundles (0., 1.) by a coupling grating (2). One of the component bundles (1.) is launched into an optical fibre (1a) and fed to a further coupling grating (3). The second component bundle (0.) passes via a plane (flat) mirror (6) to the second coupling grating (3) and interferes there with the first component bundle (1.). The second coupling grating (3) is split up into component gratings (3a, 3b, 3c) which are phase-shifted relative to one another, with the result that mutually phase-shifted signals can be generated by detectors (7a, 7b, 7c).