| 摘要 |
PURPOSE: To make it possible to efficiently and simultaneously array plural parts with high accuracy at the time of aligning these parts to each other in assembly of optical parts or mechanical parts. CONSTITUTION: This device is composed of a forming section of a pair of bidirectional light beams arranged with two mechanical stages 11A, 11B which are mounted with mechanisms for controlling positions of a half mirror 15 for branching the laser beam from a laser 14 to two light beams and a reflection mirror 16 and are capable of adjusting six axes (three parallel axes of X, Y, Z and three angle axes ofα,β,γ) in such a manner that these stages face each other, a mechanism section arranged with plural mechanical stages, such as array stage 12 or a stage 13 for waveguide substrates, which adjust the positions and attitudes of the parts placed on the mechanical stages 11A, 11B and to quantitatively measure the states thereof and are, capable of adjusting the six axes, an observation section consisting of a CCD camera 18 and monitor TV 19 for observing the places where the bidirectional light beams are cast to the parts and a personal computer 26 for storing the information of the respective mechanical stages and the images and adjusting the driving of the mechanical stages in accordance with such information.
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