Film Bulk Acoustic Wave Device,申请号CA19952163033-传众专利搜索

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发明名称	Film Bulk Acoustic Wave Device
摘要
申请公布号	CA2163033(A1)	申请公布日期	1996.05.25
申请号	CA19952163033	申请日期	1995.11.17
申请人	MITSUBISHI DENKI KABUSHIKI KAISHA	发明人	WADAKA, SHUSOU;MISU, KOICHIRO;NAGATSUKA, TSUTOMU;KIMURA, TOMONORI;KAMEYAMA, SHUNPEI;MAEDA, CHISAKO;YAMADA, AKIRA;HONDA, TOSHIHISA
分类号	H01L41/08;H01L41/22;H03H9/46;(IPC1-7):H01L41/08	主分类号	H01L41/08
代理机构		代理人
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