发明名称 |
Verfahren und Vorrichtung zur Messung der Fehlerdichte und -verteilung |
摘要 |
<p>A method and apparatus for measuring a defect distribution comprising introducing a narrowed laser beam into an object to be observed, receiving scattering lights generated at the defect portions of the object by a photoelectric conversion element, and measuring automatically the density and density distribution of the defects inside the object on the basis of the output image data of the photoelectric conversion element.</p> |
申请公布号 |
DE3854961(T2) |
申请公布日期 |
1996.05.30 |
申请号 |
DE19883854961T |
申请日期 |
1988.11.25 |
申请人 |
MITSUI MINING & SMELTING CO., LTD., TOKIO/TOKYO, JP |
发明人 |
MORIYA, KAZUO, AGEO-SHI, SAITAMA-KEN, JP |
分类号 |
G01N21/88;G01N21/00;G01N21/35;G01N21/3563;G01N21/359;G01N21/47;G01N21/95;G06T7/00;H01L21/66;(IPC1-7):G01N21/88;G06T7/60 |
主分类号 |
G01N21/88 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|