Spatial light modulator element and method of manufacturing the same

摘要

A spatial light modulator comprises at least a photoconductive layer (1A), a first transparent electrode film (2A) provided on one surface of the photoconductive layer, a light blocking layer (3) provided on the other surface of the photoconductive layer, a dielectric multilayered film (4) provided on the light blocking layer, a light modulation layer (8) provided on the dielectric multilayered film, and the other transparent electrode film (2B) provided on the surface of the light modulation layer. The light modulation layer (8) consists of a liquid crystal material for changing intensity, phase or running direction of read-out light on application of a voltage. The light blocking layer (3) is an hydrogenated amorphous silicon film.