| 摘要 |
PURPOSE: To easily judge the quality-and performance of an optical waveguide prior to the cutting into a chip by arranging an inspection/testing linear optical waveguide having both ends extended long toward the outside from both ends of a plurality of optical paths formed on a wafer. CONSTITUTION: When a wafer 1 having optical waveguide patterns 2a, 2b is cut along a cutting surface 6, only an inspection/testing optical waveguide 5 formed on a linear inspection/testing optical waveguide pattern 4 longer than the patterns 2a, 2b is cut in both end parts to form light incident and emitting end surfaces, while other optical waveguides 3a, 3b are not cut. The cut surfaces of the cut optical waveguide 5 are polished, a light wave is inputted from one of the polished end surfaces, and the optical waveguide loss from the output light from the other end is measured to measure the performance and quality of the waveguide 5. When the judgment result is good, all the waveguides 3a, 3b are judged to have good performance and quality. When the result is poor, all the waveguides 3a, 3b are judged to be defective, the sending to the following process is stopped to eliminate the waste of the work and material. |
