发明名称 MOUNTING STRUCTURE OF SEMICONDUCTOR ELEMENT, LIQUID CRYSTAL DISPLAY AND SEMICONDUCTOR DEVICE
摘要 PURPOSE: To connect a semiconductor element well by maximizing the percentage of Au4 Al in an intermetallic compound when a wiring pattern and a bump are connected electrically and mechanically by forming the intermetallic compound through solid phase diffusion reaction caused by thermocompression. CONSTITUTION: An Al wiring pattern 2 is formed on the surface of an insulating board 1. A large number of gold bumps 4 are formed on the surface of a semiconductor element 3. The semiconductor element 3 is connected electrically and mechanically by forming an intermetallic compound, in the Al wiring pattern 2 on the insulating board 1, through solid phase diffusion reaction caused by thermocompression of the gold bump 4. The intermetallic compound has such composition as the percentage of Au4 Al is maximized. Since occurrence of crack and void due to thermal impact is prevented at the joint, a highly reliable mounting structure for semiconductor element is realized.
申请公布号 JPH08227917(A) 申请公布日期 1996.09.03
申请号 JP19950244322 申请日期 1995.09.22
申请人 TOSHIBA CORP 发明人 KIZAKI YUKIO;MORI MIKI;EBITANI TAKASHI;SAITO MASAYUKI;MURAKAMI TAIJUN
分类号 H01L21/60;H01L21/321;H01L21/603;(IPC1-7):H01L21/603 主分类号 H01L21/60
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