| 摘要 |
The purpose of the present invention is to provide a pressure switch, a pressure sensor, and a module for these, that are capable of: achieving a more compact, lighter, and thinner pressure switch or pressure sensor unit; or, if the pressure switch or pressure sensor is in a module, detecting the pressure state at a plurality of locations by using one detection IC and being more compact, lighter, and thinner. This pressure switch, pressure sensor, and module for these comprise: a metal diaphragm (111); a movable-side electrode (121) electrically connected to part of the diaphragm (111); a metal fixed-side electrode (122) provided on an atmospheric pressure-side facing a conduit (11) for the diaphragm (111); an insulating film (123) that ensures insulation between the fixed-side electrode (122) and the diaphragm (111); and a capacitance detection IC (124) that detects fluctuation in capacitance between the diaphragm (111) connected to the movable-side electrode (121) and the fixed-side electrode (122). |
