| 摘要 |
<p>PURPOSE: To provide a device and method for securing a substrate by which a substrate can be sucked to a substrate placing stage with less suction errors. CONSTITUTION: A substrate securing device is provided with a substrate placing stage 10 on which a substrate 20 is placed, a plurality of suction holes which are provided to the stage 10, and suck and secure the substrate 20 by suction, and pressure members 12 and 14 which are counterposed to the stage 10 on the opposite side of the substrate 20. In a substrate securing method, the substrate is pressed by means of the pressing members 12 and 14 and sucked by the suction holes after the substrate 20 is placed on the stage 10 by using the substrate securing device constituted in the above-mentioned way.</p> |
