发明名称 Dual work function gate-type CMOS circuit prodn.
摘要 In the manufacture of a dual-work-function CMOS circuit, a polysilicon layer is produced to form the gate level, the mean grain diameter in the layer being greater that the minimum expansion in the gate level in order to suppress lateral diffusion of dopant. In particular, a narrowing is created in the gate level with a width less than the mean grain diameter.
申请公布号 DE19525069(C1) 申请公布日期 1996.10.24
申请号 DE19951025069 申请日期 1995.07.10
申请人 SIEMENS AG, 80333 MUENCHEN, DE 发明人 SCHWALKE, UDO, DR., 84431 HELDENSTEIN, DE;KERBER, MARTIN, DR., 81827 MUENCHEN, DE
分类号 H01L21/8238;H01L27/092;H01L29/423;H01L29/49;(IPC1-7):H01L21/823 主分类号 H01L21/8238
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