发明名称 RADIATION-SENSITIVE RESIN COMPOSITION AND BUMP FORMING MATERIAL
摘要 PURPOSE: To obtain a radiation-sensitive resin composition having the developability with an alkali developing solution, a sufficient resolution in a film thickness of 20μm or above, an excellent resistance to a plating solution, a good adhesion to a substrate, a good wettability with a plating solution in development, the capability of forming a good bump by plating, and an improved releasability of the curing agent from the substrate. CONSTITUTION: This composition comprises an alkali-soluble copolymer (A) composed of 10-50wt.% structural component derived from free radical- polymerizable carboxylic compound, 20-60wt.% structural component derived from a free radical-polymerizable carboxyl-free cycloalkane compound and 5-40wt.% structural component derived from other free radical-polymerizable compounds, a compound (B) having at least one ethylenic unsaturation, and a radiation-induced free radical polymerization initiator (C).
申请公布号 JPH08301911(A) 申请公布日期 1996.11.19
申请号 JP19950136034 申请日期 1995.05.10
申请人 JAPAN SYNTHETIC RUBBER CO LTD 发明人 SANO KIMIYASU;CHIBA HIDEKI;IGARASHI KATSUTOSHI
分类号 G02F1/133;C08F2/48;C08F2/54;C08L33/00;C08L33/02;C08L33/04;C25F3/14;G02F1/1333;G03F7/033;H01L21/321;H01L21/60;H05K3/00;H05K3/24;(IPC1-7):C08F2/48 主分类号 G02F1/133
代理机构 代理人
主权项
地址