摘要 |
<p>PURPOSE: To provide an inexpensive organic compound decomposing apparatus which does not need a large amount of inert gas, is applicable to the decomposition treatment of not only gas or liquid state fluorocarbons but also solid resins, small-sized, and has a high decomposition treatment capacity. CONSTITUTION: Organic compound and a decomposition auxiliary are supplied directly to the non migration type plasma generating torch 21 of a migration type plasma generator and a plasma arc 53 which is drawn out to the outside of the torch 21 by external anode parts 31, 41, and the organic compounds are reacted with the decomposition auxiliary to be decomposed. The anodes 32, 42 of the external anode parts 31, 41 are covered with mantles 35, 45 to be protected by inert gas supplied from anode protecting gas supply ports 36, 46.</p> |