| 摘要 |
<p>PURPOSE: To provide a method for forming the electrode structure of a liquid crystal display device capable of simultaneously separating and flattening liquid crystal driving electrodes without using intricate stages. CONSTITUTION: This method for forming the electrode structure of the liquid crystal display device has a stage for forming switching elements 1 and wirings for driving these switching elements on a substrate 5, then forming an insulating film 11 over the entire surface thereof, a stage for flattening this insulating film 11, a stage for removing the insulating film 11 in the regions to be formed with the liquid crystal driving electrodes 12 to a recessed shape down to prescribed depth, a stage for forming metallic films 15 for liquid crystal driving electrodes at a thickness above the depth from which this insulating film 11 is removed and a stage for patterning the liquid crystal driving electrodes 12 by polishing the metallic film 15 until the top end of the insulating film 11 is exposed. In such a case, the polishing of the metallic film 15 is executed by CMP. and the operations to separate and flatten the electrodes 12 are simultaneously executed.</p> |
