| 摘要 |
PROBLEM TO BE SOLVED: To reduce a focusing diameter through the application of a laser beam from the vertical direction and to enhance image resolution by opposing a microscope to a sample, and causing ions to fly crosswise by means of ion accelerating electrodes. SOLUTION: A sample 2 is inserted between accelerating electrodes 22. During mass spectrometry, a laser beam 7a from a laser beam source 6 is focused onto the sample 2 by a condensing lens 22. An ion beam 21b excited thereby is accelerated by an accelerating electrode 40 in an almost perpendicular direction to the direction of incidence of the laser beam and is made to impinge on a mass spectrometer part 1. The ion beam 21b is reflected by an ion reflector 30 and impinges on an ion detecting part 34. Ion flight time can be obtained by measuring the time from the application of the laser beam 7b to the arrival of the ions at the ion detector 34. Mass spectrometry of the ions can thus be performed. During observation of the sample, light from a sample illuminating light source 8 is made to impinge on the sample 2 from the condensing lens 22. An image of the sample 2 formed thereby is observed with a TV camera 10. |
