发明名称 Verfahren zur Herstellung von 3-dimensionalen Photonen-Kristallen
摘要 The system of the invention comprises a process designed for the economical and, by comparison with prior art methods, less laborious production of photon components having a plurality of spaced photon components on the surface of their substrate. According to the invention, a polymerisable swelling agent is applied to a substrate, preferably by means of vapour pressure. In a second step the swelling agent at exposed points on the substrate surface are exposed to a beam of charged particles. A conversion into solid substances having, in their refractive index and height contour, the optical effect of photon crystals takes place at these points. It is possible by the process of the invention to produce photon crystals with improved properties and especially in miniaturised form.
申请公布号 DE19628355(A1) 申请公布日期 1997.03.13
申请号 DE19961028355 申请日期 1996.07.13
申请人 DEUTSCHE TELEKOM AG, 53113 BONN, DE 发明人 KOOPS, HANS W.P., DR., 64372 OBER-RAMSTADT, DE;LIN, SHAWN-YU, DR., ALBUQUERQUE, N.M., US
分类号 G02B6/122;G02B6/13;G02B6/132;G03F7/00;(IPC1-7):G03F7/00;G03F7/20 主分类号 G02B6/122
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