| 摘要 |
<p>PROBLEM TO BE SOLVED: To simplify alarm file management having a standard alarm file and a special alarm file. SOLUTION: When the resist quanty in the resist tank 17 of a resist applying device 6 becomes insufficient, the signal of an OFF state is inputted from liquid end sensor 18 to a block controller 14. The block controller 14 transmits the effect that the resist quantity is insufficient to a main controller 19 by a communication line. The main controller 19 retrieves the standard alarm file and the special alarm file stored in an incorporated storage device based on reception information, generates alarm information of contents where the special alarm file is prior to the other concerning a same data item, outputs the alarm information to a monitor 20, a signal tower 21 and a buzzer 22, etc., and turns on the signal tower 21.</p> |
