| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a cassette which makes it possible to prevent wafers from cracking and particles from adhering wafers at the time of transferring the wafers by facilitating insertion and removal of the wafers. SOLUTION: A box-shaped cassette contains a plurality of wafers, and the cassette 1 comprises an upper body 3, a lower body 4, a post 5 stood between the body 3 and the body 4, sandwiching means A inserted to the post 5 and having a plurality of spacers 6 and a coiled spring 7 for supporting the sides of the wafers 2, and a moving mechanism B having a threaded part 9 and a nut 10 for moving the means A.</p> |
