SUBSTRATE CASSETTE

摘要

PROBLEM TO BE SOLVED: To obtain a substrate cassette which can be assembled easily and accurately and the supporting part on the unprocessed surface of the substrate is not abraded. SOLUTION: The substrate cassette comprises a plurality of pairs of supporting member 2 each provided in parallel with upper and lower frame bodies 1b and grooves 9 for holding substrates 4 by shelf pieces 8 provided at a constant interval. The supporting member 2 is fixed to the side face of frame body 1b with the shelf piece 8 facing inward thus constituting a wafer cassette where a fixed groove 15 having U-shaped plan view is made in the side face of upper and lower frame body 1b. Parts to be fitted in the fixed groove are provided at the opposite ends of supporting member 2 and an inclining face bulging toward the forward end is provided on the surface at the fixing part. An inclining face 16 is provided on the inner face of fixed groove and the fitting part of supporting member 2 is fitted in the fixed groove of frame body 1b such that the inclining faces are jointed each other and then the frame body 1 and supporting member 2 are tightened by means of a bolt and assembled.