LOW-DENSITY HIGH-POROSITY MEMBER FOR GATE DIELECTRIC OF ELECTRIC FIELD EMISSION DEVICE

摘要

PROBLEM TO BE SOLVED: To lower the consumption of electric power and provide an electron emission apparatus with improved reliability by using an aerogel, which is a material with low density and high porosity, as a gate dielectric body. SOLUTION: An electron emitting plate of an electron emitting apparatus is fabricated by the following processes: (1) forming a conductive mesh structure body 43 on an insulating substrate 40; (2) forming a resistor layer 44 on the insulating substrate 40 (42: e.g. an insulator layer of SiO2 ); (3) forming an insulator layer 48 consisting of a porous output material (e.g. an aerogel) on the resistor layer 44; (4) forming conductor layer (a gate electrode) 49 on the insulator layer 48; (5) forming a plurality of aperture parts penetrating the insulator layer 48 on the conductor layer 49; and (6) fabricating a microchip emitters on the resistor layer 44 in the insides of the aperture parts.