| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a SiC coating graphite product for a jig for semiconductor which is excellent in high temperature strength, and in which gas is not released at the time of use at a high temperature, even in use for a long period at the cost not more than that of quartz glass. SOLUTION: In a SiC coated graphite product in which SiC coated graphite parts are combined with each other, the structure is made so as to complete the close adhesion in combination portions of graphite parts, and a SiC film in the SiC coated graphite product is formed after connecting or jointing.</p> |
