发明名称 |
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To suppress a leak current in a semiconductor integrated circuit device formed on a semiconductor substrate having an input protection circuit element such as a diode formed thereon. SOLUTION: An N type MOS 9b and a P type MOS 9b are formed to be a single crystalline silicon layer of an SOI(silicon on insulator) type, and an N type diffusion layer 18 and a P type diffusion layer 19 are formed in a semiconductor substrate 1 to form a protective diode 17 which forms an input protection circuit of a CMOS inverter circuit 13 The N type diffusion layer 18 is surrounded by the P type diffusion layer 19 so that the P type diffusion layer 19 cuts off a depletion layer formed at an interface of an embedded insulating film 2 within the semiconductor substrate 1, thereby suppressing a leak current between the P and N type diffusion layers 18 and 19. |
申请公布号 |
JPH09115999(A) |
申请公布日期 |
1997.05.02 |
申请号 |
JP19950274433 |
申请日期 |
1995.10.23 |
申请人 |
DENSO CORP |
发明人 |
SUZUKI YOSHIMI;ASAI SHOKI;SAKAKIBARA JUN |
分类号 |
H01L21/761;H01L21/822;H01L21/8238;H01L27/04;H01L27/06;H01L27/092;H01L27/12;H01L29/786;(IPC1-7):H01L21/761;H01L21/823 |
主分类号 |
H01L21/761 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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