发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide a manufacturing method of a device allowing a stable set-up of a composition of solder bumps to be made connecting media at the time of a flip-chip connection. SOLUTION: Bump electrodes 161, 162,... consisting of a Pb-Sn alloy respectively are formed on in-and output pads 151, 152,... to be formed on a mounting substrate 14 and also the bump electrodes 131, 132,... are formed on in-and output pads 121, 122,... of semiconductor elements 11 only by means of Sn which is one component of the Pb-Sn. Then, the bump electrodes 161, 162,... respectively and the bump electrodes 131, 132,... respectively are temporarily stopped and to reflow so as to flip-chip connected the mounting substrate 14 and the semiconductor element 11. At the time of forming the bump electrodes 131, 132,... of the semiconductor element 11, a composition of the solder bumps after the flip-flop connection requires no consideration.</p>
申请公布号 JPH09199539(A) 申请公布日期 1997.07.31
申请号 JP19960005878 申请日期 1996.01.17
申请人 TOSHIBA MICROELECTRON CORP;TOSHIBA CORP 发明人 OKADA TAKASHI;HIRUTA YOICHI;TAKUBO TOMOAKI;TAZAWA HIROSHI;HIRANO NAOHIKO;DOI KAZUHIDE;HOSOMI HIDEKAZU;SHIBAZAKI YASUSHI
分类号 H01L21/60;H05K3/34;(IPC1-7):H01L21/60;H01L21/321 主分类号 H01L21/60
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