| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas laser oscillator which keeps the parallelism of a mirror without beam mode change and has extremely high power stability by providing a partition which changes the flow of the cooling medium in order to resolve the temperature nonuniformity in the cross-section direction of a double tube. SOLUTION: A double tube 1 used for an optical bench is composed of steel wire, steel board, etc., so as to permit cooling medium 4 to flow between the double tube outer side 2 and the double tube inner side 3, control the flow of the cooling medium 4 which flows to the double tube 1 by a partition 5 and resolve the temperature nonuniformity in the cross-section direction of the double tube 1. Then, the cooling medium 4 is permitted to flow between a pair of flanges, which are the components of the double tube 1, and between the double walls of the double tube 1, and when a partition 5 which separates the cooling medium 4 in the axis direction is placed in the double tube 1, temperature nonuniformity in the double tube 1 in the crosssection direction is resolved, extension in the double tube axis direction is fixed in the cross-section direction, and parallelism between the flanges is maintained. Therefore, a gas laser oscillator which constantly maintains parallelism between the mirror flanges without beam mode change and has extremely high power stability is provided. |
