LIFT PIN FOR ATTACHING OR DETACHING BOARD TO OR FROM CHUCK

摘要

PROBLEM TO BE SOLVED: To make it possible to detach or attach a board from or to a chuck held by the chuck by residual electrostatic charge by the process in a plasma formed by using an RF current by incorporating specific electric conduction passage between the board and a current sink. SOLUTION: The lift pin 95 is a movable slender member 110 having a chip 115 adapted to raise or lower a board from a chuck. The member 110 makes it possible to form an electric conduction passage 120 between the board and a current sink 105. Further, the passage 120 has at least one of a frequency selecting filter and a resistor. The filter filters the RF current passing the filter to substantially interrupt the RF current. The resistor has sufficient resistance value for reducing ate least by about 50% the voltage created by the RF current passing the resistor.