| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an electrostatic chuck which has excellent heat transfer properties of a heater, set temperature followability, economically low-cost manufacture and makes it possible to alleviate the thermal stress of a connected part by integrally connecting a heater mechanism of the structure integrally connected with an electric heater to one side surface of a thermal diffusion board to the electrostatic attraction mechanism. SOLUTION: In the electrostatic chuck of the structure that a heater mechanism is integrally connected to an electrostatic attracting mechanism, the heater mechanism has a structure that an electric heater is integrally connected to the one surface of a thermal diffusion board. The structure of the electric heater is to surround a ceramic insulation layer around the electric heater strands. For example, the board uses one flat plate, and the other plate formed with a groove as shown of two Mo thermal diffusion boards. As the electric heater, a sheathed heater of the structure that a Nichrome wire having a diameter of 0.2mm is inserted into a stainless pipe having an outer diameter of 3mm and a thickness of 0.2mm, and the gap is filled with magnesia ceramics densely.</p> |
