| 摘要 |
PROBLEM TO BE SOLVED: To conduct high-speed transfer operation with a conveyance device of trackless traveling system by mounting a robot arm where degree of freedom in a mobile robot mechanism, the length of an arm and so on are selected to the minimum according to the mounting height of wafer cassettes at a loader/ unloader in a group of manufacturing equipment. SOLUTION: An arm mechanism of horizontal articulated type is used. A robot base 10 is fixed on a dolly 2, on which a vertical motion mechanism 11 is installed. The first arm 12 which has rotational axis parallel to a vertical motion axis, is connected with the vertical motion mechanism 11. The second arm 13 which has a rotational axis parallel to the first arm 12, is connected with the top part of the first arm 12. The top part of the second arm 13 is provided with the third rotational axis which is parallel to the rotational axis of the second arm 13 and a hand mechanism 15 which clamps and releases a cassette 4, is fixed at the third rotational axis. For the transfer mechanism of a conveyance device constituted like this, manufacturing equipment for each process is limited so that the mechanism configuration, degree of freedom, reach, working area and so on may be millimum. |
