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发明名称
PURAZUMASHORIHOHO
摘要
申请公布号
JP2649330(B2)
申请公布日期
1997.09.03
申请号
JP19940336622
申请日期
1994.12.26
申请人
HANDOTAI ENERUGII KENKYUSHO KK
发明人
YAMAZAKI SHUNPEI;TASHIRO MAMORU;MYAZAKI MINORU
分类号
C23C16/44;C23C16/50;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01L21/205;H01L21/306
主分类号
C23C16/44
代理机构
代理人
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