| 摘要 |
<p>PROBLEM TO BE SOLVED: To make it possible to disconnect unit substrates by a scribing method by connecting the signal electrodes arranged across the lines to be cut on the adjacent unit substrates of a large substrate in the state of shifting these electrodes by a half pitch from each other and cutting the substrates at the lines to be cut after anodic oxidation. SOLUTION: A plurality of signal electrodes arranged to face each other across the lines to be cut on the adjacent unit substrates of the large substrate are so formed as to be connected in the state of shifting the electrodes by the half each from each other. The signal electrodes are energized and insulating films are formed by the anodic oxidation method. The large substrate is cut at the lines to be cut, by which the unit substrates are separated from each other. Fig. shows the two unit substrates coupled to each other. Broken lines are lines for cutting, i.e., line for scribing. Right and left terminals are coupled in the state of shifting the terminals by the half pitch from each other and eventually the Ta lines are connected to one piece from above to below. Then, the excess Ta lines do not remain even if the substrates are cut by the fine scribing lines.</p> |
