| 摘要 |
PROBLEM TO BE SOLVED: To prevent attachment and deposition of sputtered particles onto a cleaned optical surface and allow a device to serve stably for a long period of time by furnishing an electrode which is positioned on the side nearer the applicable region than a sputtered particle hindering member and which ionizes or electrostatically adsorbs the sputtered particles. SOLUTION: An X-ray transmissive film 111 is surrounded by a sputtered particle hindering member 108 in a duct shape so that the sputtered particles emitted from a target member 104 and plasma 105 to a region other than the X-ray take-out direction do not attach or deposit. In the internal space 112 of this duct, electrodes 109, 110 to ionize or electrostatically adsorb those sputtered particles 106 which have cleared hindrance of the member 108, are installed adjacent or close to a three-dimensional angular region corresponding to the area where X-rays 107 are taken out. The sputtered particles 106 having intruded into the duct space 112 will go afloat upon being decelerated by collision with gas molecules in a shield space 112. The sputtered particles having intruded into the electric field impression area are ionized by the electric field and drawn to the electrode 109 or 110 owing to the ions positive or negative. |
