| 摘要 |
<p>A magnetic device such as an inductor suitable for reducing the size used in a high frequency band, and made of an oxide magnetic material called ferroxplana having high electrical insulating properties and a high permeability. Among the types of ferroxplana, Y-type (Ba2Me2Fe12O22: where Me is a divalent metal element) and Co-containing Z-type (Ba3CO2Fe24O41) have high permeabilities in a plane vertical to the c-axis of the crystal axes. Crystals of these materials grow while being substantially oriented in the c-axis on the surface of a material having different atomic arrangement. Therefore, when a magnetic device of the present invention is fabricated by disposing a planar spiral conductor coil on the surface of a magnetic film of a ferroxplana oriented in the c-axis direction, the inductance per turn of the coil increases. Since the permeability of the ferroxplana is high even in a high frequency region of 1 GHz, the magnetic device can be utilized as an inductor suitable for reducing the size of a microwave monolithic integrated circuit, etc, and for improving its performance.</p> |
