SUBSTRATE SUPPORTING APPARATUS

摘要

PROBLEM TO BE SOLVED: To smoothly and speedily lift a substrate from a substrate holder by providing an auxiliary lifting member to slight lift the substrate just before the substrate lifting action of a main lift to lift the periphery of the substrate laid on the holder from below. SOLUTION: A substrate holder 2 has a substrate holding face 2d having holes 11a-11d corresponding to the four corners of the substrate support supported on its diagonal lines and these holes have substrate lifting pneumatic actuators 12a-12d. A pneumatic controller 6 controls the actuators such that they contact corresponding parts of the substrate 1 to slightly lift the contacted parts, drive a pneumatic up-down drive 5 to lift a lifter 3 to lift the substrate 1 through substrate support members 3a-3d at its lower center.