Method and system for improving optical measurements on small targets

摘要

A control system and method are provided for use in managing optical measurements on target structures. The control system comprises: data input utility for receiving input data indicative of a size of a target structure to be measured and input data indicative of illumination and collection channels of an optical measurement system; data processing utility for analyzing the input data, and an interplay of Point Spread Functions (PSFs) of the illumination and collection channels, and determining data indicative of optimal tailoring of apertures to be used in the optical measurement system for optimizing ensquared energy for measurements on the given target structure, the optimal tailoring comprising at least one of the following: an optimal ratio between numerical apertures of the illumination and collection channels; and an optimal orientation offset of physical apertures in the illumination and collection channels.

主权项

1. A control system for use in managing optical measurements on target structures, the control system comprising:
data input utility for receiving input data indicative of a size of a target structure to be measured and input data indicative of illumination and collection channels of an optical measurement system, data processing utility for analyzing the input data, and an interplay of Point Spread Functions (PSFs) of the illumination and collection channels, and determining data indicative of optimal tailoring apertures to be used in the optical measurement system for optimizing ensquared energy for measurements on the given target structure, the optimal tailoring comprising determining an optimal orientation offset of physical apertures in the illumination and collection channels determined by geometric separation of tails of PSFs of the illumination and collection channels, providing an optimal ratio between numerical apertures of the illumination and collection channels substantially not exceeding 50% determined by optimized multiplication function of PSFs of the illumination and collection channels, optimizing confinement of collected light from the target structure of the given size.