| 摘要 |
PROBLEM TO BE SOLVED: To suppress both an SiC reaction and the occurrence of cracking on the surface of a carbon fiber-reinforced composite material and prolong the service life by covering even the inner surface of a recessed part on the surface of the carbon fiber-reinforced carbon composite material with a thin pyrolytic carbon film. SOLUTION: This seed chuck of an apparatus for pulling up a semiconductor single crystal is formed of a carbon-fiber reinforced carbon composite material contained therein. The seed chuck is obtained by laminating prepreg sheets woven from carbon fibers lengthwise and breadthwise, press forming the resultant laminate, providing a formed product, then secondarily curing the formed product while carrying out the pressing and compression, subsequently impregnating the resultant product with a carbonaceous material, baking the impregnated product, affording a seed chuck, then installing the resultant seed chuck in a reactional tube of a vacuum heating furnace, evacuating and degassing the interior of the reactional tube, subsequently heating the seed chuck at 800-2500 deg.C, keeping the internal pressure in the furnace under <=100Torr while feeding a gas at 3-30% hydrocarbon concentration thereto and pyrolyzing the hydrocarbon. Thereby, even the inner surfaces of open holes 21 present on the surface of the seed chuck are covered with a pyrolytic carbon film 5 having <=20μm average thickness.
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