| 摘要 |
PROBLEM TO BE SOLVED: To provide a management system which can provide users with information relating to a time required for manufacturing operations to facilitate management of production steps. SOLUTION: A master computer 1 integrally controls units such as a positioning control unit 21 as a lower-level unit having a relatively simple function of controlling sections of a manufacturing apparatus, a stage control unit 22 and a substrate transportation unit 23 to thereby control automatic manufacturing steps of a predetermined item. The management is carried out by one or ones of functions of the units 21, 22,... so that a process forming a part of the automatic manufacturing steps is measured by a built-in clock 12 with respect to its a time required for its execution, and then the measured time is recorded in a memory 15 in a predetermined recording format. The required recorded time is analyzed by a productivity analysis program 13 and its analysis result is displayed on a display unit 14. |
